Atomistic simulation of EELS of SiON/Si interface and SiON breakdown
Electron Energy Loss Spectroscopy (EELS) is the statistical observation of energy loss of the emitted electrons from Transmission Electron Microscope (TEM). The electron beam undergoes a many-body scattering process with nucleus and electrons of the specimen. The electrons energy loss spectrum which...
Main Author: | Wang, Zhongrui. |
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Other Authors: | Pey Kin Leong |
Format: | Final Year Project (FYP) |
Language: | English |
Published: |
2009
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/17925 |
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