Single-shot 3D imaging meta-microscope

Three-dimensional (3D) imaging enables high-precision and high-resolution axial positioning, which is crucial for biological imaging, semiconductor defect monitoring, and other applications. Conventional implementations rely on bulky optical elements or scanning mechanisms, resulting in low speed an...

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Main Authors: Hao, Huijie, Wang, Hao, Wang, Xinwei, Ding, Xumin, Zhang, Shutao, Pan, Cheng-Feng, Rahman, Md Abdur, Ling, Tong, Li, Haoyu, Tan, Jiubin, Yang, Joel K. W., Lu, Wenlong, Liu, Jian, Hu, Guangwei
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2025
Subjects:
Online Access:https://hdl.handle.net/10356/182307
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author Hao, Huijie
Wang, Hao
Wang, Xinwei
Ding, Xumin
Zhang, Shutao
Pan, Cheng-Feng
Rahman, Md Abdur
Ling, Tong
Li, Haoyu
Tan, Jiubin
Yang, Joel K. W.
Lu, Wenlong
Liu, Jian
Hu, Guangwei
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Hao, Huijie
Wang, Hao
Wang, Xinwei
Ding, Xumin
Zhang, Shutao
Pan, Cheng-Feng
Rahman, Md Abdur
Ling, Tong
Li, Haoyu
Tan, Jiubin
Yang, Joel K. W.
Lu, Wenlong
Liu, Jian
Hu, Guangwei
author_sort Hao, Huijie
collection NTU
description Three-dimensional (3D) imaging enables high-precision and high-resolution axial positioning, which is crucial for biological imaging, semiconductor defect monitoring, and other applications. Conventional implementations rely on bulky optical elements or scanning mechanisms, resulting in low speed and complicated setups. Here, we generate the double-helix (DH) point spread function with an all-dielectric metasurface and thus innovate the 3D imaging microscope (hence dubbed meta-microscope), both in 4f and 2f imaging systems. The 4f-meta-microscope with a numerical aperture of 0.7 achieves an axial localization accuracy below 0.12 μm within a 15.47 μm detection range, while the 2f-DH meta-microscope with a numerical aperture of 0.3 shows a 1.12 μm accuracy within a 227.33 μm range. We also demonstrate single-shot and accurate 3D biological imaging of the mouse kidney tissue and peach anther, providing a comprehensive and efficient approach for 3D bioimaging and other applications through a single-shot 3D meta-microscope.
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spelling ntu-10356/1823072025-01-21T04:05:26Z Single-shot 3D imaging meta-microscope Hao, Huijie Wang, Hao Wang, Xinwei Ding, Xumin Zhang, Shutao Pan, Cheng-Feng Rahman, Md Abdur Ling, Tong Li, Haoyu Tan, Jiubin Yang, Joel K. W. Lu, Wenlong Liu, Jian Hu, Guangwei School of Electrical and Electronic Engineering School of Chemistry, Chemical Engineering and Biotechnology Institute of Materials Research and Engineering, A*STAR Singapore Eye Research Institute SERI-NTU Advanced Ocular Engineering (STANCE) Program Engineering 3D imaging Biological imaging Three-dimensional (3D) imaging enables high-precision and high-resolution axial positioning, which is crucial for biological imaging, semiconductor defect monitoring, and other applications. Conventional implementations rely on bulky optical elements or scanning mechanisms, resulting in low speed and complicated setups. Here, we generate the double-helix (DH) point spread function with an all-dielectric metasurface and thus innovate the 3D imaging microscope (hence dubbed meta-microscope), both in 4f and 2f imaging systems. The 4f-meta-microscope with a numerical aperture of 0.7 achieves an axial localization accuracy below 0.12 μm within a 15.47 μm detection range, while the 2f-DH meta-microscope with a numerical aperture of 0.3 shows a 1.12 μm accuracy within a 227.33 μm range. We also demonstrate single-shot and accurate 3D biological imaging of the mouse kidney tissue and peach anther, providing a comprehensive and efficient approach for 3D bioimaging and other applications through a single-shot 3D meta-microscope. Ministry of Education (MOE) Nanyang Technological University National Research Foundation (NRF) X.M.D. acknowledges funding from the National Key R&D Program of China (2021YFF0603500), National Natural Science Foundation of China (62275063). G.H. acknowledges the Nanyang Assistant Professorship Start-up Grant, Ministry of Education (Singapore) under AcRF TIER1 (RG61/23), and National Research Foundation of Singapore under award no. CRP22-2019-0064 and NRF-CRP29-2022-0003. J.K.W.Y. acknowledges funding support from the National Research Foundation (NRF), Prime Minister’s Office, Singapore, under its Competitive Research Programme award NRF-CRP20-2017-0004 and NRF-CRP29-2022-0001, under its Campus of Research Excellence and Technological Enterprise (CREATE)programme, and NRF Investigatorship Award NRF-NRFI06-2020-0005, and Lite-On Project RS-INDUS-00090. 2025-01-21T04:05:26Z 2025-01-21T04:05:26Z 2024 Journal Article Hao, H., Wang, H., Wang, X., Ding, X., Zhang, S., Pan, C., Rahman, M. A., Ling, T., Li, H., Tan, J., Yang, J. K. W., Lu, W., Liu, J. & Hu, G. (2024). Single-shot 3D imaging meta-microscope. Nano Letters, 24(42), 13364-13373. https://dx.doi.org/10.1021/acs.nanolett.4c03952 1530-6984 https://hdl.handle.net/10356/182307 10.1021/acs.nanolett.4c03952 39393017 2-s2.0-85206491141 42 24 13364 13373 en NAP SUG RG61/23 CRP22-2019-0064 NRF-CRP29-2022-0003 Nano Letters © 2024 American Chemical Society. All rights reserved.
spellingShingle Engineering
3D imaging
Biological imaging
Hao, Huijie
Wang, Hao
Wang, Xinwei
Ding, Xumin
Zhang, Shutao
Pan, Cheng-Feng
Rahman, Md Abdur
Ling, Tong
Li, Haoyu
Tan, Jiubin
Yang, Joel K. W.
Lu, Wenlong
Liu, Jian
Hu, Guangwei
Single-shot 3D imaging meta-microscope
title Single-shot 3D imaging meta-microscope
title_full Single-shot 3D imaging meta-microscope
title_fullStr Single-shot 3D imaging meta-microscope
title_full_unstemmed Single-shot 3D imaging meta-microscope
title_short Single-shot 3D imaging meta-microscope
title_sort single shot 3d imaging meta microscope
topic Engineering
3D imaging
Biological imaging
url https://hdl.handle.net/10356/182307
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AT wanghao singleshot3dimagingmetamicroscope
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