Investigation of new materials for fast speed phase-change random access memory

Phase Change Random Access Memory (PCRAM) has shown to have the most potential over other types of emerging non-volatile memories to become an alternative to FLASH memories. However, several problems regarding its practical use still remain. In this project, studies to increase the life time of th...

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Bibliographic Details
Main Author: Law, Minghui
Other Authors: Tay Beng Kang
Format: Final Year Project (FYP)
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/18980
Description
Summary:Phase Change Random Access Memory (PCRAM) has shown to have the most potential over other types of emerging non-volatile memories to become an alternative to FLASH memories. However, several problems regarding its practical use still remain. In this project, studies to increase the life time of the PCRAM through insertion of a diffusion barrier were performed. Germanium nitride (GeN) with 45.05 at% nitrogen had shown excellent properties as a diffusion barrier and had been incorporated into the PCRAM cell structure to investigate its device performance. GeN films with high nitrogen content showed excellent thermal stability, good RMS surface roughness and high electrical resistivity and these are important parameters for the PCRAM device.