Material removal utilizing electrokinetic phenomenon on amorphous aluminium surfaces
To satisfy the global market demand in producing ever-smaller scales devices with higher dimensional accuracy and functional efficiency, material removal in nanometric level has become a huge interest and a great challenge. In order to have higher performance and reliability of miniaturized devices,...
Main Author: | Chua, Janet Min Chien. |
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Other Authors: | David Lee Butler |
Format: | Final Year Project (FYP) |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/20788 |
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