Fabrication and characterization of microelectronic materials & devices (III)
Fabrication and characterization of microelectronic materials and devices.
| Main Author: | |
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/2705 |
| _version_ | 1811696223343607808 |
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| author | Tse, Man Siu. |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Tse, Man Siu. |
| author_sort | Tse, Man Siu. |
| collection | NTU |
| description | Fabrication and characterization of microelectronic materials and devices. |
| first_indexed | 2024-10-01T07:35:57Z |
| format | Research Report |
| id | ntu-10356/2705 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T07:35:57Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/27052023-03-04T03:24:10Z Fabrication and characterization of microelectronic materials & devices (III) Tse, Man Siu. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Fabrication and characterization of microelectronic materials and devices. RGM 26/97 2008-09-17T09:13:21Z 2008-09-17T09:13:21Z 2000 2000 Research Report http://hdl.handle.net/10356/2705 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Tse, Man Siu. Fabrication and characterization of microelectronic materials & devices (III) |
| title | Fabrication and characterization of microelectronic materials & devices (III) |
| title_full | Fabrication and characterization of microelectronic materials & devices (III) |
| title_fullStr | Fabrication and characterization of microelectronic materials & devices (III) |
| title_full_unstemmed | Fabrication and characterization of microelectronic materials & devices (III) |
| title_short | Fabrication and characterization of microelectronic materials & devices (III) |
| title_sort | fabrication and characterization of microelectronic materials devices iii |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Microelectronics |
| url | http://hdl.handle.net/10356/2705 |
| work_keys_str_mv | AT tsemansiu fabricationandcharacterizationofmicroelectronicmaterialsdevicesiii |