Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/2735 |
| _version_ | 1826120895561728000 |
|---|---|
| author | Zhang, Qing |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Zhang, Qing |
| author_sort | Zhang, Qing |
| collection | NTU |
| description | The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD. |
| first_indexed | 2024-10-01T05:23:54Z |
| format | Research Report |
| id | ntu-10356/2735 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:23:54Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/27352023-03-04T03:22:14Z Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy Zhang, Qing School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials The primary objective of this project is to investigate the optical absorption using photothermal deflection spectroscopy (PDS), C-C bonding structures using Raman spectroscopy and film surface morphology using x-ray reflectivity for diamond-like carbon (DLC) films, which were deposited using either electron cyclotron resonance chemical vapor deposition (CVD) or plasma enhanced CVD. RG 59/96 2008-09-17T09:14:00Z 2008-09-17T09:14:00Z 2000 2000 Research Report http://hdl.handle.net/10356/2735 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Zhang, Qing Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title_full | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title_fullStr | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title_full_unstemmed | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title_short | Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| title_sort | characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials |
| url | http://hdl.handle.net/10356/2735 |
| work_keys_str_mv | AT zhangqing characterizationofamorphousanddiamondlikecarbonfilmsusingphotothermaldeflectionspectorscopy |