Development of the lithographic sources and processes for device fabrication

Development of the lithographic sources and processes for device fabrication

The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.

Bibliographic Details
Main Authors:	Wong, Terence Kin Shun, Lee, Sing, Xu, Shuyan, Lee, Paul Choon Keat, Tan, Augustine Tuck Lee, Rawat, Rajdeep Singh, Liu, Mahe, Ostrikov, Kostyantyn, Vladimir Koudriachov, Li, Yin An
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Online Access:	http://hdl.handle.net/10356/2796

Description
Summary:	The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.