Characterization of amorphous silicon carbide thin films for display applications

Characterization of amorphous silicon carbide thin films for display applications

The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application.

Bibliographic Details
Main Authors: Ahn, Jaeshin, Yoon, Soon Fatt
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/2817

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