Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology

The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with tot...

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Bibliographic Details
Main Author: Zhu, Weiguang.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2899
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author Zhu, Weiguang.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Zhu, Weiguang.
author_sort Zhu, Weiguang.
collection NTU
description The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with total of S$999,800.00 for a period of 3.25 years (1 December 2002 - 29 February 2004; the original end date was 30 November 2003 for 3-year period, and 4-month extension was granted from A*STAR). The project has been very successfully carried out, most specifications have been met and exceeded (few cannot be met such as the number of Master students trained due to the constrains with the environment and policy), a collaborative project along with the project has been funded by a local private company, Acoustical Technologies (S) Pte Ltd, of $60,000.00, and the project has filled 2 patents, one granted and one pending, presented 5 invited papers, and published 33 referred technical papers in reputed international journals and 16 conference papers (please see the attached Publication List).
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spelling ntu-10356/28992023-03-04T03:24:28Z Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology Zhu, Weiguang. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with total of S$999,800.00 for a period of 3.25 years (1 December 2002 - 29 February 2004; the original end date was 30 November 2003 for 3-year period, and 4-month extension was granted from A*STAR). The project has been very successfully carried out, most specifications have been met and exceeded (few cannot be met such as the number of Master students trained due to the constrains with the environment and policy), a collaborative project along with the project has been funded by a local private company, Acoustical Technologies (S) Pte Ltd, of $60,000.00, and the project has filled 2 patents, one granted and one pending, presented 5 invited papers, and published 33 referred technical papers in reputed international journals and 16 conference papers (please see the attached Publication List). 2008-09-17T09:16:41Z 2008-09-17T09:16:41Z 2004 2004 Research Report http://hdl.handle.net/10356/2899 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Zhu, Weiguang.
Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title_full Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title_fullStr Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title_full_unstemmed Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title_short Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology
title_sort ferroelectric thin film micro infrared sensor and micro actuator using surface micro machining and laser mbe technology
topic DRNTU::Engineering::Electrical and electronic engineering
url http://hdl.handle.net/10356/2899
work_keys_str_mv AT zhuweiguang ferroelectricthinfilmmicroinfraredsensorandmicroactuatorusingsurfacemicromachiningandlasermbetechnology