Design and frabrication of deposition system for thin film display devices

Design and frabrication of deposition system for thin film display devices.

Bibliographic Details
Main Author: Shi, Xu
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2994
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author Shi, Xu
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Shi, Xu
author_sort Shi, Xu
collection NTU
description Design and frabrication of deposition system for thin film display devices.
first_indexed 2024-10-01T07:28:04Z
format Research Report
id ntu-10356/2994
institution Nanyang Technological University
last_indexed 2024-10-01T07:28:04Z
publishDate 2008
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spelling ntu-10356/29942023-03-04T03:24:03Z Design and frabrication of deposition system for thin film display devices Shi, Xu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Design and frabrication of deposition system for thin film display devices. 2008-09-17T09:18:21Z 2008-09-17T09:18:21Z 1998 1998 Research Report http://hdl.handle.net/10356/2994 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Shi, Xu
Design and frabrication of deposition system for thin film display devices
title Design and frabrication of deposition system for thin film display devices
title_full Design and frabrication of deposition system for thin film display devices
title_fullStr Design and frabrication of deposition system for thin film display devices
title_full_unstemmed Design and frabrication of deposition system for thin film display devices
title_short Design and frabrication of deposition system for thin film display devices
title_sort design and frabrication of deposition system for thin film display devices
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
url http://hdl.handle.net/10356/2994
work_keys_str_mv AT shixu designandfrabricationofdepositionsystemforthinfilmdisplaydevices