Design and frabrication of deposition system for thin film display devices

Design and frabrication of deposition system for thin film display devices

Design and frabrication of deposition system for thin film display devices.

Detalhes bibliográficos
Autor principal:	Shi, Xu
Outros Autores:	School of Electrical and Electronic Engineering
Formato:	Research Report
Publicado em:	2008
Assuntos:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Acesso em linha:	http://hdl.handle.net/10356/2994

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