Fabrication and characterisation of microelectronics materials and devices
To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3005 |
| _version_ | 1826111266729492480 |
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| author | Lam, Yee Loy |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Lam, Yee Loy |
| author_sort | Lam, Yee Loy |
| collection | NTU |
| description | To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications. |
| first_indexed | 2024-10-01T02:47:52Z |
| format | Research Report |
| id | ntu-10356/3005 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T02:47:52Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/30052023-03-04T03:19:36Z Fabrication and characterisation of microelectronics materials and devices Lam, Yee Loy School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications. RGM 21/96 2008-09-17T09:18:40Z 2008-09-17T09:18:40Z 1999 1999 Research Report http://hdl.handle.net/10356/3005 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Lam, Yee Loy Fabrication and characterisation of microelectronics materials and devices |
| title | Fabrication and characterisation of microelectronics materials and devices |
| title_full | Fabrication and characterisation of microelectronics materials and devices |
| title_fullStr | Fabrication and characterisation of microelectronics materials and devices |
| title_full_unstemmed | Fabrication and characterisation of microelectronics materials and devices |
| title_short | Fabrication and characterisation of microelectronics materials and devices |
| title_sort | fabrication and characterisation of microelectronics materials and devices |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Microelectronics |
| url | http://hdl.handle.net/10356/3005 |
| work_keys_str_mv | AT lamyeeloy fabricationandcharacterisationofmicroelectronicsmaterialsanddevices |