Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characte...
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| Format: | Research Report |
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2008
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| Online Access: | http://hdl.handle.net/10356/3037 |
| _version_ | 1811684788036173824 |
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| author | Zhu, Weiguang |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Zhu, Weiguang |
| author_sort | Zhu, Weiguang |
| collection | NTU |
| description | In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique. |
| first_indexed | 2024-10-01T04:34:11Z |
| format | Research Report |
| id | ntu-10356/3037 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T04:34:11Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/30372023-03-04T03:21:30Z Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology Zhu, Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique. RG 69/94 2008-09-17T09:19:19Z 2008-09-17T09:19:19Z 1998 1998 Research Report http://hdl.handle.net/10356/3037 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Semiconductors Zhu, Weiguang Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title | Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title_full | Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title_fullStr | Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title_full_unstemmed | Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title_short | Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology |
| title_sort | fabrication and characterization of semiconductor gas senors by metallo organic decomposition mod and thick film technology |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Semiconductors |
| url | http://hdl.handle.net/10356/3037 |
| work_keys_str_mv | AT zhuweiguang fabricationandcharacterizationofsemiconductorgassenorsbymetalloorganicdecompositionmodandthickfilmtechnology |