Ion gun development/Ion beam etching and deposition system development
Development of ion gun and ion beam etching and deposition system.
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/3042 |
| _version_ | 1826111558880591872 |
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| author | Ahn, Jaeshin |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Ahn, Jaeshin |
| author_sort | Ahn, Jaeshin |
| collection | NTU |
| description | Development of ion gun and ion beam etching and deposition system. |
| first_indexed | 2024-10-01T02:52:42Z |
| format | Research Report |
| id | ntu-10356/3042 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T02:52:42Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/30422023-03-04T03:19:41Z Ion gun development/Ion beam etching and deposition system development Ahn, Jaeshin School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering Development of ion gun and ion beam etching and deposition system. RP 11/87 2008-09-17T09:19:22Z 2008-09-17T09:19:22Z 2000 2000 Research Report http://hdl.handle.net/10356/3042 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering Ahn, Jaeshin Ion gun development/Ion beam etching and deposition system development |
| title | Ion gun development/Ion beam etching and deposition system development |
| title_full | Ion gun development/Ion beam etching and deposition system development |
| title_fullStr | Ion gun development/Ion beam etching and deposition system development |
| title_full_unstemmed | Ion gun development/Ion beam etching and deposition system development |
| title_short | Ion gun development/Ion beam etching and deposition system development |
| title_sort | ion gun development ion beam etching and deposition system development |
| topic | DRNTU::Engineering::Electrical and electronic engineering |
| url | http://hdl.handle.net/10356/3042 |
| work_keys_str_mv | AT ahnjaeshin iongundevelopmentionbeametchinganddepositionsystemdevelopment |