Ion gun development/Ion beam etching and deposition system development

Development of ion gun and ion beam etching and deposition system.

Bibliographic Details
Main Author:	Ahn, Jaeshin
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/3042

Internet

http://hdl.handle.net/10356/3042