Material characterization and device design of TiNx infrared microemitter
This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.
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| Other Authors: | |
| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/3668 |
| _version_ | 1811683749021089792 |
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| author | Wang, Jun Min. |
| author2 | Mei, Ting |
| author_facet | Mei, Ting Wang, Jun Min. |
| author_sort | Wang, Jun Min. |
| collection | NTU |
| description | This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools. |
| first_indexed | 2024-10-01T04:17:40Z |
| format | Thesis |
| id | ntu-10356/3668 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T04:17:40Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/36682023-07-04T15:49:37Z Material characterization and device design of TiNx infrared microemitter Wang, Jun Min. Mei, Ting School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools. Master of Engineering 2008-09-17T09:34:51Z 2008-09-17T09:34:51Z 2004 2004 Thesis http://hdl.handle.net/10356/3668 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering Wang, Jun Min. Material characterization and device design of TiNx infrared microemitter |
| title | Material characterization and device design of TiNx infrared microemitter |
| title_full | Material characterization and device design of TiNx infrared microemitter |
| title_fullStr | Material characterization and device design of TiNx infrared microemitter |
| title_full_unstemmed | Material characterization and device design of TiNx infrared microemitter |
| title_short | Material characterization and device design of TiNx infrared microemitter |
| title_sort | material characterization and device design of tinx infrared microemitter |
| topic | DRNTU::Engineering::Electrical and electronic engineering |
| url | http://hdl.handle.net/10356/3668 |
| work_keys_str_mv | AT wangjunmin materialcharacterizationanddevicedesignoftinxinfraredmicroemitter |