Material characterization using electron beam induced current
This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals.
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| Other Authors: | |
| Format: | Thesis |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3762 |
| _version_ | 1811686945091223552 |
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| author | Wu, Det Hau. |
| author2 | Ong, Vincent Keng Sian |
| author_facet | Ong, Vincent Keng Sian Wu, Det Hau. |
| author_sort | Wu, Det Hau. |
| collection | NTU |
| description | This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals. |
| first_indexed | 2024-10-01T05:08:28Z |
| format | Thesis |
| id | ntu-10356/3762 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:08:28Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/37622023-07-04T16:28:05Z Material characterization using electron beam induced current Wu, Det Hau. Ong, Vincent Keng Sian School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials This research work presented in this thesis is concerned with the determination of material parameters of a semiconductor specimen from the EBIC signals. Doctor of Philosophy (EEE) 2008-09-17T09:37:00Z 2008-09-17T09:37:00Z 2003 2003 Thesis http://hdl.handle.net/10356/3762 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Wu, Det Hau. Material characterization using electron beam induced current |
| title | Material characterization using electron beam induced current |
| title_full | Material characterization using electron beam induced current |
| title_fullStr | Material characterization using electron beam induced current |
| title_full_unstemmed | Material characterization using electron beam induced current |
| title_short | Material characterization using electron beam induced current |
| title_sort | material characterization using electron beam induced current |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials |
| url | http://hdl.handle.net/10356/3762 |
| work_keys_str_mv | AT wudethau materialcharacterizationusingelectronbeaminducedcurrent |