The temperature distribution and thermal stresses induced during processing of partial SOI structures

In this work, the numerical results on the distribution of thermal stress at the interface of partial SOI structures are presented.

書目詳細資料
主要作者: Chen, Junming.
其他作者: Tan, Cher Ming
格式: Thesis
出版: 2008
主題:
在線閱讀:http://hdl.handle.net/10356/3771
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author Chen, Junming.
author2 Tan, Cher Ming
author_facet Tan, Cher Ming
Chen, Junming.
author_sort Chen, Junming.
collection NTU
description In this work, the numerical results on the distribution of thermal stress at the interface of partial SOI structures are presented.
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institution Nanyang Technological University
last_indexed 2024-10-01T06:39:58Z
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spelling ntu-10356/37712023-07-04T16:24:01Z The temperature distribution and thermal stresses induced during processing of partial SOI structures Chen, Junming. Tan, Cher Ming School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors In this work, the numerical results on the distribution of thermal stress at the interface of partial SOI structures are presented. Master of Engineering 2008-09-17T09:37:10Z 2008-09-17T09:37:10Z 2002 2002 Thesis http://hdl.handle.net/10356/3771 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Chen, Junming.
The temperature distribution and thermal stresses induced during processing of partial SOI structures
title The temperature distribution and thermal stresses induced during processing of partial SOI structures
title_full The temperature distribution and thermal stresses induced during processing of partial SOI structures
title_fullStr The temperature distribution and thermal stresses induced during processing of partial SOI structures
title_full_unstemmed The temperature distribution and thermal stresses induced during processing of partial SOI structures
title_short The temperature distribution and thermal stresses induced during processing of partial SOI structures
title_sort temperature distribution and thermal stresses induced during processing of partial soi structures
topic DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
url http://hdl.handle.net/10356/3771
work_keys_str_mv AT chenjunming thetemperaturedistributionandthermalstressesinducedduringprocessingofpartialsoistructures
AT chenjunming temperaturedistributionandthermalstressesinducedduringprocessingofpartialsoistructures