Synthesis, characterisation and device application of silicon nanocrystals

259 p.

Bibliographic Details
Main Author: Ng, Chi Yung
Other Authors: Chen Tupei
Format: Thesis
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/10356/39044
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author_facet Chen Tupei
Ng, Chi Yung
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description 259 p.
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spelling ntu-10356/390442023-07-04T17:33:34Z Synthesis, characterisation and device application of silicon nanocrystals Ng, Chi Yung Chen Tupei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics 259 p. It is the intent of this work to investigate the physics and device applications of silicon nanocrystals embedded in dielectric film. Silicon nanocrystals embedded in Si02 film have been synthesized using ion-implantation. Metal-oxide-semiconductor field-effect-transistors (MOSFET) embedded with silicon nanocrystal as charge storage node has also been fabricated. The electrical characteristics of the structure are obtained using the conventional current-voltage (I-V) and capacitance-voltage (C-V) techniques. To identify the size of the silicon nanocrystal, X-ray Diffraction (XRD) and cross-section Transmission Electron Microscopy (TEM) measurements have been conducted. DOCTOR OF PHILOSOPHY (EEE) 2010-05-21T04:38:24Z 2010-05-21T04:38:24Z 2007 2007 Thesis Ng, C. Y. (2007). Synthesis, characterisation and device application of silicon nanocrystals. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/39044 10.32657/10356/39044 application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Ng, Chi Yung
Synthesis, characterisation and device application of silicon nanocrystals
title Synthesis, characterisation and device application of silicon nanocrystals
title_full Synthesis, characterisation and device application of silicon nanocrystals
title_fullStr Synthesis, characterisation and device application of silicon nanocrystals
title_full_unstemmed Synthesis, characterisation and device application of silicon nanocrystals
title_short Synthesis, characterisation and device application of silicon nanocrystals
title_sort synthesis characterisation and device application of silicon nanocrystals
topic DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
url https://hdl.handle.net/10356/39044
work_keys_str_mv AT ngchiyung synthesischaracterisationanddeviceapplicationofsiliconnanocrystals