Fabrication and characterization of silicon-germanium schottky diode

91 p.

Bibliographic Details
Main Author: Chakravarthi Nanda Kumar
Other Authors: Tse Man Siu
Format: Thesis
Published: 2010
Subjects:
Online Access:http://hdl.handle.net/10356/39149
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author Chakravarthi Nanda Kumar
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author_facet Tse Man Siu
Chakravarthi Nanda Kumar
author_sort Chakravarthi Nanda Kumar
collection NTU
description 91 p.
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spelling ntu-10356/391492023-07-04T15:29:39Z Fabrication and characterization of silicon-germanium schottky diode Chakravarthi Nanda Kumar Tse Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering 91 p. Schottky diodes have been widely used in power detection and microwave circuits due to their high switching speeds and low voltage drop. They are often fabricated by depositing metals on n-type or p-type semiconductor materials [1]. Silicon and Silicon Germanium Schottky diodes were fabricated and characterized in this project. Chromium, Gold, Copper, Titanium, Nickel, Nickel-Platinum were used as Schottky metals in the fabrication of n-type Silicon and Silicon Germanium Schottky diodes. Silicon Germanium films were grown epitaxially on the Silicon substrate. The Schottky characteristics, which include barrier height, series resistance and ideality factors, were studied and compared for each of these metals. Behavior of the Schottky characteristics at different alloying temperatures was also studied. A strong dependence of these characteristics on the alloying temperatures, procedures were observed. Master of Science (Microelectronics) 2010-05-21T04:45:58Z 2010-05-21T04:45:58Z 2007 2007 Thesis http://hdl.handle.net/10356/39149 application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Chakravarthi Nanda Kumar
Fabrication and characterization of silicon-germanium schottky diode
title Fabrication and characterization of silicon-germanium schottky diode
title_full Fabrication and characterization of silicon-germanium schottky diode
title_fullStr Fabrication and characterization of silicon-germanium schottky diode
title_full_unstemmed Fabrication and characterization of silicon-germanium schottky diode
title_short Fabrication and characterization of silicon-germanium schottky diode
title_sort fabrication and characterization of silicon germanium schottky diode
topic DRNTU::Engineering::Electrical and electronic engineering
url http://hdl.handle.net/10356/39149
work_keys_str_mv AT chakravarthinandakumar fabricationandcharacterizationofsilicongermaniumschottkydiode