Optimization process of disk resonator

Optimization process of disk resonator

For a microelectromechanical system (MEMS) device such as disk resonator, its design must be optimized before it is fabricated. This report presents part of optimization process of disk resonator using a FEA solver, COMSOL Multiphysics. In the beginning, how MEMS device, particularly disk resonator,...

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Bibliographic Details
Main Author: Suryanata, Lukas Hari.
Other Authors: School of Mechanical and Aerospace Engineering
Format: Final Year Project (FYP)
Language:English
Published: 2010
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:http://hdl.handle.net/10356/40495

Internet

http://hdl.handle.net/10356/40495

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