Verification of selected electron beam induced current (EBIC) techniques
The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (S...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4104 |
| _version_ | 1811689198561787904 |
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| author | Ang, Alex Yong Guan |
| author2 | Ong, Vincent Keng Sian |
| author_facet | Ong, Vincent Keng Sian Ang, Alex Yong Guan |
| author_sort | Ang, Alex Yong Guan |
| collection | NTU |
| description | The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (SEM) operating in the electron beam-induced current (EBIC) mode. |
| first_indexed | 2024-10-01T05:44:17Z |
| format | Thesis |
| id | ntu-10356/4104 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:44:17Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/41042023-07-04T15:12:44Z Verification of selected electron beam induced current (EBIC) techniques Ang, Alex Yong Guan Ong, Vincent Keng Sian School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors The diffusion lengths of materials within semiconductor devices have a very strong impact on device performance. Therefore, there is a need to establish a method that is capable of determining the diffusion length accurately within a semiconductor device. By using the scanning electron microscope (SEM) operating in the electron beam-induced current (EBIC) mode. Master of Science (Integrated Circuit Design) 2008-09-17T09:44:32Z 2008-09-17T09:44:32Z 2003 2003 Thesis http://hdl.handle.net/10356/4104 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Semiconductors Ang, Alex Yong Guan Verification of selected electron beam induced current (EBIC) techniques |
| title | Verification of selected electron beam induced current (EBIC) techniques |
| title_full | Verification of selected electron beam induced current (EBIC) techniques |
| title_fullStr | Verification of selected electron beam induced current (EBIC) techniques |
| title_full_unstemmed | Verification of selected electron beam induced current (EBIC) techniques |
| title_short | Verification of selected electron beam induced current (EBIC) techniques |
| title_sort | verification of selected electron beam induced current ebic techniques |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Semiconductors |
| url | http://hdl.handle.net/10356/4104 |
| work_keys_str_mv | AT angalexyongguan verificationofselectedelectronbeaminducedcurrentebictechniques |