Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides

Highly photosensitive sol-gel derived inorganic 0.2GeO2:0.8SiO2 (germanosilicate) films have been developed to simplify the fabrication of photonic devices using a single step direct UV-imprinting (DUI) technique. The KrF excimer laser (248 nm) light induced refractive index change (?n) of germanosi...

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Bibliographic Details
Main Author: Rajni
Other Authors: Kantisara Pita
Format: Thesis
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/4113
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author Rajni
author2 Kantisara Pita
author_facet Kantisara Pita
Rajni
author_sort Rajni
collection NTU
description Highly photosensitive sol-gel derived inorganic 0.2GeO2:0.8SiO2 (germanosilicate) films have been developed to simplify the fabrication of photonic devices using a single step direct UV-imprinting (DUI) technique. The KrF excimer laser (248 nm) light induced refractive index change (?n) of germanosilicate films has been investigated. The values of ?n increases with UV-illumination time, and saturated at ~ 0.0094 in case of densified thin films (~ 200 nm), and at ~ 0.005 in case of thick films (~ 3 µm). This high value of ?n is attributed to the creation of oxygen deficiency, and found to be high enough to form optical guiding channel. Photonic waveguide devices such as channel-waveguides, optical splitters and switches have been successfully fabricated using the DUI technique and the results are found to be in good agreement with the theoretical results.
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spelling ntu-10356/41132023-07-04T17:37:49Z Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides Rajni Kantisara Pita School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio Highly photosensitive sol-gel derived inorganic 0.2GeO2:0.8SiO2 (germanosilicate) films have been developed to simplify the fabrication of photonic devices using a single step direct UV-imprinting (DUI) technique. The KrF excimer laser (248 nm) light induced refractive index change (?n) of germanosilicate films has been investigated. The values of ?n increases with UV-illumination time, and saturated at ~ 0.0094 in case of densified thin films (~ 200 nm), and at ~ 0.005 in case of thick films (~ 3 µm). This high value of ?n is attributed to the creation of oxygen deficiency, and found to be high enough to form optical guiding channel. Photonic waveguide devices such as channel-waveguides, optical splitters and switches have been successfully fabricated using the DUI technique and the results are found to be in good agreement with the theoretical results. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:44:44Z 2008-09-17T09:44:44Z 2008 2008 Thesis Rajni. (2008). Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4113 10.32657/10356/4113 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
Rajni
Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title_full Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title_fullStr Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title_full_unstemmed Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title_short Development of highly photosensitive low loss inorganic sol-gel films for direct ultraviolet-imprinting of planar waveguides
title_sort development of highly photosensitive low loss inorganic sol gel films for direct ultraviolet imprinting of planar waveguides
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
url https://hdl.handle.net/10356/4113
work_keys_str_mv AT rajni developmentofhighlyphotosensitivelowlossinorganicsolgelfilmsfordirectultravioletimprintingofplanarwaveguides