Development of in situ monitoring for micro-electrical discharge machining
With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the...
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Online Access: | https://hdl.handle.net/10356/41569 |
| Summary: | With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate. |
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