Device parameters characterization with the use of EBIC

The performance of bipolar and photodiode devices is determined by the transport properties of the minority carriers, such as the minority carrier diffusion lengths and the surface recombination velocities. The Electron Beam Induced Current (EBIC) technique of the Scanning Electron Microscopy (SEM)...

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Bibliographic Details
Main Author: Oka Kurniawan
Other Authors: Ong Keng Sian, Vincent
Format: Thesis
Language:English
Published: 2010
Subjects:
Online Access:https://hdl.handle.net/10356/41843