Thermal conductivity measurements and modeling of thin films
In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to inc...
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Format: | Thesis |
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2008
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Online Access: | http://hdl.handle.net/10356/4286 |
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author | Chung, George Kit Chen. |
author2 | Hui, Ping |
author_facet | Hui, Ping Chung, George Kit Chen. |
author_sort | Chung, George Kit Chen. |
collection | NTU |
description | In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to include thermal resistance, pulse shape factor and various boundary conditions. Various pulse shapes are also studied to understand on their effect in curve fitting a three-layer sample, Au/ta-C/Si. It is found that the fitted thermal conductivity of Au is highly pulse shape dependent, but the pulse shape does not affect the thermal property determination of ta-C. |
first_indexed | 2024-10-01T07:12:19Z |
format | Thesis |
id | ntu-10356/4286 |
institution | Nanyang Technological University |
last_indexed | 2024-10-01T07:12:19Z |
publishDate | 2008 |
record_format | dspace |
spelling | ntu-10356/42862023-07-04T16:31:29Z Thermal conductivity measurements and modeling of thin films Chung, George Kit Chen. Hui, Ping School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to include thermal resistance, pulse shape factor and various boundary conditions. Various pulse shapes are also studied to understand on their effect in curve fitting a three-layer sample, Au/ta-C/Si. It is found that the fitted thermal conductivity of Au is highly pulse shape dependent, but the pulse shape does not affect the thermal property determination of ta-C. Doctor of Philosophy (EEE) 2008-09-17T09:48:21Z 2008-09-17T09:48:21Z 2000 2000 Thesis http://hdl.handle.net/10356/4286 Nanyang Technological University application/pdf |
spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Chung, George Kit Chen. Thermal conductivity measurements and modeling of thin films |
title | Thermal conductivity measurements and modeling of thin films |
title_full | Thermal conductivity measurements and modeling of thin films |
title_fullStr | Thermal conductivity measurements and modeling of thin films |
title_full_unstemmed | Thermal conductivity measurements and modeling of thin films |
title_short | Thermal conductivity measurements and modeling of thin films |
title_sort | thermal conductivity measurements and modeling of thin films |
topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
url | http://hdl.handle.net/10356/4286 |
work_keys_str_mv | AT chunggeorgekitchen thermalconductivitymeasurementsandmodelingofthinfilms |