FE simulation of thin film mechanical sensitivity for MEMS applications
In this report, the use of corrugated diaphragm for microphone sensing is discussed. The corrugated diaphragm is a type of thin film MEMS device that is actuated by an external pressure. The diaphragm’s height is studied in this project to determine the optimum mechanical sensitivity, natural freque...
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| Other Authors: | |
| Format: | Final Year Project (FYP) |
| Language: | English |
| Published: |
2011
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| Online Access: | http://hdl.handle.net/10356/42866 |
| _version_ | 1811679424051937280 |
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| author | Zhang, Xin Gang |
| author2 | Lin Rongming |
| author_facet | Lin Rongming Zhang, Xin Gang |
| author_sort | Zhang, Xin Gang |
| collection | NTU |
| description | In this report, the use of corrugated diaphragm for microphone sensing is discussed. The corrugated diaphragm is a type of thin film MEMS device that is actuated by an external pressure. The diaphragm’s height is studied in this project to determine the optimum mechanical sensitivity, natural frequency and initial stress loading. The use of ANSYS Finite Element Analysis software is to obtain the necessary values for study instead of actual experiment which is costly and time consuming.
The content of this report on ANSYS application, such as modeling and simulation, including detailed procedures taken to obtain the necessary results serves to provide a guide for further research to be carried out.
Finally, the comparisons were made between six case studies and the chosen design is concluded based on the criterion of microphone sensing. |
| first_indexed | 2024-10-01T03:08:56Z |
| format | Final Year Project (FYP) |
| id | ntu-10356/42866 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:08:56Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/428662023-03-04T18:59:42Z FE simulation of thin film mechanical sensitivity for MEMS applications Zhang, Xin Gang Lin Rongming School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering In this report, the use of corrugated diaphragm for microphone sensing is discussed. The corrugated diaphragm is a type of thin film MEMS device that is actuated by an external pressure. The diaphragm’s height is studied in this project to determine the optimum mechanical sensitivity, natural frequency and initial stress loading. The use of ANSYS Finite Element Analysis software is to obtain the necessary values for study instead of actual experiment which is costly and time consuming. The content of this report on ANSYS application, such as modeling and simulation, including detailed procedures taken to obtain the necessary results serves to provide a guide for further research to be carried out. Finally, the comparisons were made between six case studies and the chosen design is concluded based on the criterion of microphone sensing. Bachelor of Engineering 2011-01-25T05:49:45Z 2011-01-25T05:49:45Z 2010 2010 Final Year Project (FYP) http://hdl.handle.net/10356/42866 en Nanyang Technological University 81 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Zhang, Xin Gang FE simulation of thin film mechanical sensitivity for MEMS applications |
| title | FE simulation of thin film mechanical sensitivity for MEMS applications |
| title_full | FE simulation of thin film mechanical sensitivity for MEMS applications |
| title_fullStr | FE simulation of thin film mechanical sensitivity for MEMS applications |
| title_full_unstemmed | FE simulation of thin film mechanical sensitivity for MEMS applications |
| title_short | FE simulation of thin film mechanical sensitivity for MEMS applications |
| title_sort | fe simulation of thin film mechanical sensitivity for mems applications |
| topic | DRNTU::Engineering::Mechanical engineering |
| url | http://hdl.handle.net/10356/42866 |
| work_keys_str_mv | AT zhangxingang fesimulationofthinfilmmechanicalsensitivityformemsapplications |