A study of semiconductor nanostructures formed by surface modification

Semiconductor nanostructures formed by a surface modification process caused by ion sputtering is studied in this thesis. The microscopic dynamics of the semiconductor surface undergoing ion impingement is discussed in detail. Due to the promising controllability and minimal damage creation on the s...

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Bibliographic Details
Main Author: Wang, Yang
Other Authors: Yoon Soon Fatt
Format: Thesis
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/43568

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