Study on electron transport in ta-C film and the photo response of ta-C based hetero-junction
The Filtered Cathodic Vacuum Arc (FCVA) technique has been extensively studied for application on thin film deposition processes for many years. However some problems associated with the process control still exist. One typical contradiction in FCVA system is that on the one hand a high arc spot vel...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4419 |