Studies of optical properties of silicon-rich silicon nitride thin films
Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si...
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| Format: | Thesis |
| Language: | English |
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2011
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| Online Access: | http://hdl.handle.net/10356/44566 |
| _version_ | 1826124632608997376 |
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| author | Cen, Zhanhong |
| author2 | Chen Tupei |
| author_facet | Chen Tupei Cen, Zhanhong |
| author_sort | Cen, Zhanhong |
| collection | NTU |
| description | Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si nanoparticles embedded in the silicon nitride matrix have been investigated with spectroscopic ellipsometry. Strong light emissions from different SRN films under optical pumping (i.e., photoluminescence or PL) or electrical pumping (i.e., electroluminescence or EL) have been observed. The PL properties and mechanisms have been studied. Strong visible EL with electrically-tunable colors and even white color from the light-emitting structures based on the SRN films has been demonstrated. The EL properties and their dependence on the synthesis conditions of the SNR films have been investigated. In addition, it is found that the charge trapping in SRN films strongly influences the EL properties. |
| first_indexed | 2024-10-01T06:23:53Z |
| format | Thesis |
| id | ntu-10356/44566 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:23:53Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/445662023-07-04T16:13:21Z Studies of optical properties of silicon-rich silicon nitride thin films Cen, Zhanhong Chen Tupei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si nanoparticles embedded in the silicon nitride matrix have been investigated with spectroscopic ellipsometry. Strong light emissions from different SRN films under optical pumping (i.e., photoluminescence or PL) or electrical pumping (i.e., electroluminescence or EL) have been observed. The PL properties and mechanisms have been studied. Strong visible EL with electrically-tunable colors and even white color from the light-emitting structures based on the SRN films has been demonstrated. The EL properties and their dependence on the synthesis conditions of the SNR films have been investigated. In addition, it is found that the charge trapping in SRN films strongly influences the EL properties. Doctor of Philosophy 2011-06-02T06:35:13Z 2011-06-02T06:35:13Z 2011 2011 Thesis http://hdl.handle.net/10356/44566 en 287 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Cen, Zhanhong Studies of optical properties of silicon-rich silicon nitride thin films |
| title | Studies of optical properties of silicon-rich silicon nitride thin films |
| title_full | Studies of optical properties of silicon-rich silicon nitride thin films |
| title_fullStr | Studies of optical properties of silicon-rich silicon nitride thin films |
| title_full_unstemmed | Studies of optical properties of silicon-rich silicon nitride thin films |
| title_short | Studies of optical properties of silicon-rich silicon nitride thin films |
| title_sort | studies of optical properties of silicon rich silicon nitride thin films |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics |
| url | http://hdl.handle.net/10356/44566 |
| work_keys_str_mv | AT cenzhanhong studiesofopticalpropertiesofsiliconrichsiliconnitridethinfilms |