Fabrication and characterization of sputtered ZnO thin film for head-disk interface application

Fabrication and characterization of sputtered ZnO thin film for head-disk interface application

The increasing of hard disk capacities requires a decreasing flying height of hard disk drive slider. The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. In this study, ZnO thin films were deposited on Si and Al/SiO2/Si substrate using...

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Bibliographic Details
Main Author: Yu, Xue.
Other Authors: Du Hejun
Format: Final Year Project (FYP)
Language:English
Published: 2011
Subjects:
DRNTU::Engineering::Manufacturing
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/45236

Internet

http://hdl.handle.net/10356/45236

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