Fabrication and characterization of sputtered ZnO thin film for head-disk interface application
The increasing of hard disk capacities requires a decreasing flying height of hard disk drive slider. The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. In this study, ZnO thin films were deposited on Si and Al/SiO2/Si substrate using...
Main Author: | Yu, Xue. |
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Other Authors: | Du Hejun |
Format: | Final Year Project (FYP) |
Language: | English |
Published: |
2011
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/45236 |
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