Study of elasto-polymer for supercritical CO2 wafer processing
Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete a...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4533 |
| _version_ | 1826120105788964864 |
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| author | Kyaw, Aung. |
| author2 | Tse Man Siu |
| author_facet | Tse Man Siu Kyaw, Aung. |
| author_sort | Kyaw, Aung. |
| collection | NTU |
| description | Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year. |
| first_indexed | 2024-10-01T05:11:04Z |
| format | Thesis |
| id | ntu-10356/4533 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:11:04Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/45332023-07-04T15:42:58Z Study of elasto-polymer for supercritical CO2 wafer processing Kyaw, Aung. Tse Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year. Master of Science (Microelectronics) 2008-09-17T09:53:36Z 2008-09-17T09:53:36Z 2005 2005 Thesis http://hdl.handle.net/10356/4533 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Kyaw, Aung. Study of elasto-polymer for supercritical CO2 wafer processing |
| title | Study of elasto-polymer for supercritical CO2 wafer processing |
| title_full | Study of elasto-polymer for supercritical CO2 wafer processing |
| title_fullStr | Study of elasto-polymer for supercritical CO2 wafer processing |
| title_full_unstemmed | Study of elasto-polymer for supercritical CO2 wafer processing |
| title_short | Study of elasto-polymer for supercritical CO2 wafer processing |
| title_sort | study of elasto polymer for supercritical co2 wafer processing |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging |
| url | http://hdl.handle.net/10356/4533 |
| work_keys_str_mv | AT kyawaung studyofelastopolymerforsupercriticalco2waferprocessing |