Investigation of effects of residual stress on the stiffness of MEMS devices
In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by th...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2011
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| Online Access: | http://hdl.handle.net/10356/45471 |