Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.
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Formato: | Tese |
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2008
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Acesso em linha: | https://hdl.handle.net/10356/4572 |
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author | Lee, Hiong Weng |
author2 | Lau Shu Ping, Daniel |
author_facet | Lau Shu Ping, Daniel Lee, Hiong Weng |
author_sort | Lee, Hiong Weng |
collection | NTU |
description | A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor. |
first_indexed | 2024-10-01T07:08:23Z |
format | Thesis |
id | ntu-10356/4572 |
institution | Nanyang Technological University |
last_indexed | 2024-10-01T07:08:23Z |
publishDate | 2008 |
record_format | dspace |
spelling | ntu-10356/45722023-07-04T17:38:39Z Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique Lee, Hiong Weng Lau Shu Ping, Daniel School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor. MASTER OF ENGINEERING (EEE) 2008-09-17T09:54:32Z 2008-09-17T09:54:32Z 2005 2005 Thesis Lee, H. W. (2005). Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4572 10.32657/10356/4572 Nanyang Technological University application/pdf |
spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Lee, Hiong Weng Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title | Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title_full | Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title_fullStr | Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title_full_unstemmed | Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title_short | Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique |
title_sort | low temperature growth of zno thin films by filtered cathodic vacuum arc technique |
topic | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials |
url | https://hdl.handle.net/10356/4572 |
work_keys_str_mv | AT leehiongweng lowtemperaturegrowthofznothinfilmsbyfilteredcathodicvacuumarctechnique |