Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique

A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.

Detalhes bibliográficos
Autor principal: Lee, Hiong Weng
Outros Autores: Lau Shu Ping, Daniel
Formato: Tese
Publicado em: 2008
Assuntos:
Acesso em linha:https://hdl.handle.net/10356/4572
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author Lee, Hiong Weng
author2 Lau Shu Ping, Daniel
author_facet Lau Shu Ping, Daniel
Lee, Hiong Weng
author_sort Lee, Hiong Weng
collection NTU
description A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.
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institution Nanyang Technological University
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spelling ntu-10356/45722023-07-04T17:38:39Z Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique Lee, Hiong Weng Lau Shu Ping, Daniel School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor. MASTER OF ENGINEERING (EEE) 2008-09-17T09:54:32Z 2008-09-17T09:54:32Z 2005 2005 Thesis Lee, H. W. (2005). Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4572 10.32657/10356/4572 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Lee, Hiong Weng
Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title_full Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title_fullStr Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title_full_unstemmed Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title_short Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
title_sort low temperature growth of zno thin films by filtered cathodic vacuum arc technique
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
url https://hdl.handle.net/10356/4572
work_keys_str_mv AT leehiongweng lowtemperaturegrowthofznothinfilmsbyfilteredcathodicvacuumarctechnique