Predictive intelligence for process correlation modeling
Advances in technology like the miniaturization of electronic devices have caused wafer fabrication to be a competitive field. In order to succeed in the wafer fabrication industry, one way is to increase the process yield. This can be done by decreasing the downtime of machines and increasing the q...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2011
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| Online Access: | http://hdl.handle.net/10356/45878 |