A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction...
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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2011
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| Online Access: | https://hdl.handle.net/10356/46232 |
| _version_ | 1826129839841607680 |
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| author | Tan, Chee Wee |
| author2 | Miao Jianmin |
| author_facet | Miao Jianmin Tan, Chee Wee |
| author_sort | Tan, Chee Wee |
| collection | NTU |
| description | In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed. |
| first_indexed | 2024-10-01T07:47:06Z |
| format | Thesis |
| id | ntu-10356/46232 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T07:47:06Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/462322023-03-11T17:39:55Z A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application Tan, Chee Wee Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed. DOCTOR OF PHILOSOPHY (MAE) 2011-07-08T03:10:51Z 2011-07-08T03:10:51Z 2011 2011 Thesis Tan, C. W. (2011). A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/46232 10.32657/10356/46232 en 184 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Tan, Chee Wee A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title | A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title_full | A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title_fullStr | A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title_full_unstemmed | A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title_short | A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application |
| title_sort | theoretical and experimental study of the viscous damping effect for diaphragm based mems application |
| topic | DRNTU::Engineering::Mechanical engineering |
| url | https://hdl.handle.net/10356/46232 |
| work_keys_str_mv | AT tancheewee atheoreticalandexperimentalstudyoftheviscousdampingeffectfordiaphragmbasedmemsapplication AT tancheewee theoreticalandexperimentalstudyoftheviscousdampingeffectfordiaphragmbasedmemsapplication |