Design and fabrication of MEMS optical switches
This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/4640 |
| _version_ | 1824453405576265728 |
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| author | Li, Jing |
| author2 | Liu, Ai Qun |
| author_facet | Liu, Ai Qun Li, Jing |
| author_sort | Li, Jing |
| collection | NTU |
| description | This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch. |
| first_indexed | 2024-10-01T07:59:49Z |
| format | Thesis |
| id | ntu-10356/4640 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T07:59:49Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/46402023-07-04T17:18:52Z Design and fabrication of MEMS optical switches Li, Jing Liu, Ai Qun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:55:48Z 2008-09-17T09:55:48Z 2006 2006 Thesis Li, J. (2006). Design and fabrication of MEMS optical switches. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4640 10.32657/10356/4640 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Li, Jing Design and fabrication of MEMS optical switches |
| title | Design and fabrication of MEMS optical switches |
| title_full | Design and fabrication of MEMS optical switches |
| title_fullStr | Design and fabrication of MEMS optical switches |
| title_full_unstemmed | Design and fabrication of MEMS optical switches |
| title_short | Design and fabrication of MEMS optical switches |
| title_sort | design and fabrication of mems optical switches |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics |
| url | https://hdl.handle.net/10356/4640 |
| work_keys_str_mv | AT lijing designandfabricationofmemsopticalswitches |