Lutetium oxide gate dielectric fabricated by pulsed laser deposition.
152 p.
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| Other Authors: | |
| Format: | Thesis |
| Published: |
2011
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| Online Access: | https://hdl.handle.net/10356/47288 |
| _version_ | 1826112321503625216 |
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| author | Peter Darmawan. |
| author2 | Lee Pooi See |
| author_facet | Lee Pooi See Peter Darmawan. |
| author_sort | Peter Darmawan. |
| collection | NTU |
| description | 152 p. |
| first_indexed | 2024-10-01T03:05:05Z |
| format | Thesis |
| id | ntu-10356/47288 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T03:05:05Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/472882023-03-04T16:40:51Z Lutetium oxide gate dielectric fabricated by pulsed laser deposition. Peter Darmawan. Lee Pooi See School of Materials Science & Engineering DRNTU::Engineering 152 p. The aim of this project is to investigate the suitability of rare-earth oxide as gate dielectric, in particular LU2O3. There are three main chapters, in which the properties of LU2O3 film, the effect of post-deposition treatments on LU2O3 film as well as the properties of Lu203 on the next generation of semiconductor substrate are discussed in detail. DOCTOR OF PHILOSOPHY (MSE) 2011-12-27T06:54:02Z 2011-12-27T06:54:02Z 2010 2010 Thesis Peter Darmawan. (2010). Lutetium oxide gate dielectric fabricated by pulsed laser deposition. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/47288 10.32657/10356/47288 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering Peter Darmawan. Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title | Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title_full | Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title_fullStr | Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title_full_unstemmed | Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title_short | Lutetium oxide gate dielectric fabricated by pulsed laser deposition. |
| title_sort | lutetium oxide gate dielectric fabricated by pulsed laser deposition |
| topic | DRNTU::Engineering |
| url | https://hdl.handle.net/10356/47288 |
| work_keys_str_mv | AT peterdarmawan lutetiumoxidegatedielectricfabricatedbypulsedlaserdeposition |