Development of high dielectric constant SrTiO3 thin films
This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/4805 |
| _version_ | 1811684808645935104 |
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| author | Loo, Martin Chih Chien. |
| author2 | Radhakrishnan, K. |
| author_facet | Radhakrishnan, K. Loo, Martin Chih Chien. |
| author_sort | Loo, Martin Chih Chien. |
| collection | NTU |
| description | This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques. |
| first_indexed | 2024-10-01T04:34:31Z |
| format | Thesis |
| id | ntu-10356/4805 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T04:34:31Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/48052023-07-04T15:43:27Z Development of high dielectric constant SrTiO3 thin films Loo, Martin Chih Chien. Radhakrishnan, K. School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques. Master of Engineering 2008-09-17T09:59:05Z 2008-09-17T09:59:05Z 2002 2002 Thesis http://hdl.handle.net/10356/4805 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Loo, Martin Chih Chien. Development of high dielectric constant SrTiO3 thin films |
| title | Development of high dielectric constant SrTiO3 thin films |
| title_full | Development of high dielectric constant SrTiO3 thin films |
| title_fullStr | Development of high dielectric constant SrTiO3 thin films |
| title_full_unstemmed | Development of high dielectric constant SrTiO3 thin films |
| title_short | Development of high dielectric constant SrTiO3 thin films |
| title_sort | development of high dielectric constant srtio3 thin films |
| topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | http://hdl.handle.net/10356/4805 |
| work_keys_str_mv | AT loomartinchihchien developmentofhighdielectricconstantsrtio3thinfilms |