Development of high dielectric constant SrTiO3 thin films

Development of high dielectric constant SrTiO3 thin films

This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.

Bibliographic Details
Main Author: Loo, Martin Chih Chien.
Other Authors: Radhakrishnan, K.
Format: Thesis
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/4805

Internet

http://hdl.handle.net/10356/4805

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