Nanopatterning of 2D periodic structures using multi-facet prism based interferometric lithography
Nanotechnology and its applications are growing at a rapid pace and the contribution of the technology is so immense that the research in fabricating nanoscale structures using different types of technologies is a most exciting area. Optical lithography is one of the most widely and commercially use...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2012
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| Online Access: | http://hdl.handle.net/10356/49294 |