Scanning methodology
Illustrate the various sampling strategy used in different phase of a product cycle, comparing two types of inspection tools and presenting three case studies to illustrate the importance of early detection. The impact of defects towards wafer yield will also be addressed.
Main Author: | Ong, Lay Ting. |
---|---|
Other Authors: | Prasad, Krishnamachar |
Format: | Thesis |
Published: |
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/5004 |
Similar Items
-
Investigation of nano-porous silicon fabricated by electrochemical etching
by: Ong, June Lay Ting
Published: (2011) -
Design and implementation of formal verification methodology using Boolean satisfiability
by: Phone, Thet Khaing.
Published: (2011) -
Electromagnetic spectrum scanning
by: Chen, Shi
Published: (2016) -
New design methodologies for low complexity fir filters and reconfigurable constant multipliers
by: Chen, Jiajia
Published: (2011) -
Detection of stress and emotion in speech using traditional and FFT based log energy features
by: Nwe, Tin Lay, et al.
Published: (2009)