Intelligent supervisory control for microelectronics fabrication
In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the waf...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2012
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| Online Access: | http://hdl.handle.net/10356/50165 |
| _version_ | 1826123440424222720 |
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| author | Ling, Sze Ling. |
| author2 | Ling Keck Voon |
| author_facet | Ling Keck Voon Ling, Sze Ling. |
| author_sort | Ling, Sze Ling. |
| collection | NTU |
| description | In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the wafer is an issue of the process. |
| first_indexed | 2024-10-01T06:04:41Z |
| format | Final Year Project (FYP) |
| id | ntu-10356/50165 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:04:41Z |
| publishDate | 2012 |
| record_format | dspace |
| spelling | ntu-10356/501652023-07-07T16:54:23Z Intelligent supervisory control for microelectronics fabrication Ling, Sze Ling. Ling Keck Voon School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the wafer is an issue of the process. Bachelor of Engineering 2012-05-30T07:16:07Z 2012-05-30T07:16:07Z 2012 2012 Final Year Project (FYP) http://hdl.handle.net/10356/50165 en Nanyang Technological University 52 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering Ling, Sze Ling. Intelligent supervisory control for microelectronics fabrication |
| title | Intelligent supervisory control for microelectronics fabrication |
| title_full | Intelligent supervisory control for microelectronics fabrication |
| title_fullStr | Intelligent supervisory control for microelectronics fabrication |
| title_full_unstemmed | Intelligent supervisory control for microelectronics fabrication |
| title_short | Intelligent supervisory control for microelectronics fabrication |
| title_sort | intelligent supervisory control for microelectronics fabrication |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering |
| url | http://hdl.handle.net/10356/50165 |
| work_keys_str_mv | AT lingszeling intelligentsupervisorycontrolformicroelectronicsfabrication |