Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing
This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural featur...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Final Year Project (FYP) |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/51036 |
| _version_ | 1824456561085382656 |
|---|---|
| author | Chia, Mark Sebastian Xiong Wei. |
| author2 | Miao Jianmin |
| author_facet | Miao Jianmin Chia, Mark Sebastian Xiong Wei. |
| author_sort | Chia, Mark Sebastian Xiong Wei. |
| collection | NTU |
| description | This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural features of the biological lateral-line of the blind cave fish. The report also illustrates the steps taken to form a MEMs sensor array using both both Liquid crystal polymer (LCP) and Polydimethylsiloxan (PDMS) for packaging and fabrication purposes. Lastly the report also includes experiments to test the static pressure sensing and dynamic pressure sensing capabilities of the sensor array, at the same time performing sensor calibration. |
| first_indexed | 2025-02-19T03:56:03Z |
| format | Final Year Project (FYP) |
| id | ntu-10356/51036 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2025-02-19T03:56:03Z |
| publishDate | 2013 |
| record_format | dspace |
| spelling | ntu-10356/510362023-03-04T18:49:52Z Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing Chia, Mark Sebastian Xiong Wei. Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Nanotechnology This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural features of the biological lateral-line of the blind cave fish. The report also illustrates the steps taken to form a MEMs sensor array using both both Liquid crystal polymer (LCP) and Polydimethylsiloxan (PDMS) for packaging and fabrication purposes. Lastly the report also includes experiments to test the static pressure sensing and dynamic pressure sensing capabilities of the sensor array, at the same time performing sensor calibration. Bachelor of Engineering (Mechanical Engineering) 2013-01-03T03:18:52Z 2013-01-03T03:18:52Z 2012 2012 Final Year Project (FYP) http://hdl.handle.net/10356/51036 en Nanyang Technological University 65 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Nanotechnology Chia, Mark Sebastian Xiong Wei. Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title | Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title_full | Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title_fullStr | Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title_full_unstemmed | Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title_short | Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing |
| title_sort | fabrication and packaging of piezoresistive mems pressure sensor array for passive fish like underwater sensing |
| topic | DRNTU::Engineering::Nanotechnology |
| url | http://hdl.handle.net/10356/51036 |
| work_keys_str_mv | AT chiamarksebastianxiongwei fabricationandpackagingofpiezoresistivememspressuresensorarrayforpassivefishlikeunderwatersensing |