Fabrication and packaging of piezoresistive MEMS pressure sensor array for passive fish-like underwater sensing
This report consists of the author’s work which was to develop an array of Piezoresistive MEMs pressure sensors which are capable of operating in harsh underwater environment and conditions. The inspiration was to develop a MEMS artificial lateral-line sensory system, mimicking the structural featur...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2013
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| Online Access: | http://hdl.handle.net/10356/51036 |