Silicon incorporated amorphous carbon films for BioMEMS application
Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific com...
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| Format: | Thesis |
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2008
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| Online Access: | https://hdl.handle.net/10356/5286 |
| _version_ | 1826119496609300480 |
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| author | Ong, Soon Eng |
| author2 | Sam Zhang Shanyong |
| author_facet | Sam Zhang Shanyong Ong, Soon Eng |
| author_sort | Ong, Soon Eng |
| collection | NTU |
| description | Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific community. In the as deposited state, the material exhibits extremely high compressive stress. In order for the micro machined structures to work, the films must have very low stress and very low stress gradients. Preliminary studies have shown Si doping not only reduces the stress, it can improve the haemocompatibility of a Caswell. Therefore, Si doped a-C is suitable for MEMS devices in medical applications. Amorphous carbon containing Si (aC(Si)) exhibits some very desirable characteristics. |
| first_indexed | 2024-10-01T05:00:58Z |
| format | Thesis |
| id | ntu-10356/5286 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:00:58Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/52862023-03-11T17:45:18Z Silicon incorporated amorphous carbon films for BioMEMS application Ong, Soon Eng Sam Zhang Shanyong School of Mechanical and Aerospace Engineering Du Hejun DRNTU::Engineering::Materials::Biomaterials Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific community. In the as deposited state, the material exhibits extremely high compressive stress. In order for the micro machined structures to work, the films must have very low stress and very low stress gradients. Preliminary studies have shown Si doping not only reduces the stress, it can improve the haemocompatibility of a Caswell. Therefore, Si doped a-C is suitable for MEMS devices in medical applications. Amorphous carbon containing Si (aC(Si)) exhibits some very desirable characteristics. DOCTOR OF PHILOSOPHY (MAE) 2008-09-17T10:47:05Z 2008-09-17T10:47:05Z 2008 2008 Thesis Ong, S. E. (2008). Silicon incorporated amorphous carbon films for BioMEMS application. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5286 10.32657/10356/5286 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Materials::Biomaterials Ong, Soon Eng Silicon incorporated amorphous carbon films for BioMEMS application |
| title | Silicon incorporated amorphous carbon films for BioMEMS application |
| title_full | Silicon incorporated amorphous carbon films for BioMEMS application |
| title_fullStr | Silicon incorporated amorphous carbon films for BioMEMS application |
| title_full_unstemmed | Silicon incorporated amorphous carbon films for BioMEMS application |
| title_short | Silicon incorporated amorphous carbon films for BioMEMS application |
| title_sort | silicon incorporated amorphous carbon films for biomems application |
| topic | DRNTU::Engineering::Materials::Biomaterials |
| url | https://hdl.handle.net/10356/5286 |
| work_keys_str_mv | AT ongsooneng siliconincorporatedamorphouscarbonfilmsforbiomemsapplication |