Design of a tracking system for semiconductor equipment
The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.
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| Other Authors: | |
| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5326 |
| _version_ | 1826125564190130176 |
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| author | Vijendran, M. |
| author2 | Sivakumar |
| author_facet | Sivakumar Vijendran, M. |
| author_sort | Vijendran, M. |
| collection | NTU |
| description | The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment. |
| first_indexed | 2024-10-01T06:38:43Z |
| format | Thesis |
| id | ntu-10356/5326 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T06:38:43Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/53262023-03-11T17:14:20Z Design of a tracking system for semiconductor equipment Vijendran, M. Sivakumar School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment. Master of Science (Computer Integrated Manufacturing) 2008-09-17T10:47:54Z 2008-09-17T10:47:54Z 2001 2001 Thesis http://hdl.handle.net/10356/5326 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing Vijendran, M. Design of a tracking system for semiconductor equipment |
| title | Design of a tracking system for semiconductor equipment |
| title_full | Design of a tracking system for semiconductor equipment |
| title_fullStr | Design of a tracking system for semiconductor equipment |
| title_full_unstemmed | Design of a tracking system for semiconductor equipment |
| title_short | Design of a tracking system for semiconductor equipment |
| title_sort | design of a tracking system for semiconductor equipment |
| topic | DRNTU::Engineering::Manufacturing |
| url | http://hdl.handle.net/10356/5326 |
| work_keys_str_mv | AT vijendranm designofatrackingsystemforsemiconductorequipment |