Design of a tracking system for semiconductor equipment

Design of a tracking system for semiconductor equipment

The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.

Bibliographic Details
Main Author:	Vijendran, M.
Other Authors:	Sivakumar
Format:	Thesis
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/5326

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