Nanoscale characterization and analysis of localized degradation and breakdown of high-k dielectric stacks

Nanoscale characterization and analysis of localized degradation and breakdown of high-k dielectric stacks

Degradation and breakdown of high-κ (HK) dielectrics in advanced complementary metal-oxide-semiconductor (CMOS) technology node is one of the major challenges, due to its polycrystalline microstructure upon post-deposition annealing. Grain boundaries (GBs) in polycrystalline HK dielectrics with a hi...

Detaylı Bibliyografya
Yazar:	Shubhakar.
Diğer Yazarlar:	Pey Kin Leong
Materyal Türü:	Tez
Dil:	English
Baskı/Yayın Bilgisi:	2013
Konular:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Erişim:	http://hdl.handle.net/10356/53914

Benzer Materyaller

Nanoscale characterization of advanced high-κ gate dielectric stacks via scanning tunneling microscopy
Yazar:: Yew, Kwang Sing
Baskı/Yayın Bilgisi: (2014)

Digital breakdown and switching behaviours in high-K dielectrics in nano-scale mosfets
Yazar:: Liu, Wenhu.
Baskı/Yayın Bilgisi: (2013)

Analysis of high-dielectric constant gate stack reliability for nanoscale CMOS devices application via scanning tunneling microscopy
Yazar:: Ong, Yi Ching
Baskı/Yayın Bilgisi: (2009)

Nanoscale physical analysis of localized breakdown events in HfO2/SiOX dielectric stacks : a correlation study of STM induced BD with C-AFM and TEM
Yazar:: Shubhakar, K., ve diğerleri
Baskı/Yayın Bilgisi: (2013)

Study of breakdown in ultrathin gate dielectrics in nanoscale MOSFETs
Yazar:: Lo, Vui Lip
Baskı/Yayın Bilgisi: (2010)

Advanced CMOS technologies (high-k/metal gate stacks) for sub-22nm node
Yazar:: Wu, Ling
Baskı/Yayın Bilgisi: (2013)

Role of grain boundary percolative defects and localized trap generation on the reliability statistics of high-κ gate dielectric stacks
Yazar:: Raghavan, Nagarajan, ve diğerleri
Baskı/Yayın Bilgisi: (2013)

Statistical characterization and reliability modeling of novel high-K gate dielectric stacks
Yazar:: Nagarajan Raghavan
Baskı/Yayın Bilgisi: (2012)

Study of degradation mechanisms in SiON gate dielectric film subjected to negative bias temperature instability (NBTI) stress
Yazar:: Kang, Chun Wei.
Baskı/Yayın Bilgisi: (2012)

Characterization of gate oxide degradation caused by electrical stress
Yazar:: Huang, Jiayi.
Baskı/Yayın Bilgisi: (2008)

Simulation of post-breakdown transistor performance in ultrathin gate dielectrics-based nanoscale MOSFETs
Yazar:: Yaw, Meng Kwan.
Baskı/Yayın Bilgisi: (2009)

Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability
Yazar:: Gu, Chenjie
Baskı/Yayın Bilgisi: (2015)

Dielectric properties of nanostructure
Yazar:: Huang, Sai Feng.
Baskı/Yayın Bilgisi: (2010)

Resistive and breakdown study of two-terminal graphene-based memory devices
Yazar:: Fairus Sholihin Abu Bakar
Baskı/Yayın Bilgisi: (2015)

Growth and characterization of low-k dielectrics for multilevel interconnect applications
Yazar:: Wang, Minrui
Baskı/Yayın Bilgisi: (2008)

Electrical characterization of bias temperature instability in MOSFETs with the ultrathin SiON and la-doped HfSiO gate dielectrics
Yazar:: Du, Guoan.
Baskı/Yayın Bilgisi: (2013)

Fringing effect on the measurement of permittivity of dielectric materials
Yazar:: Chen, Yi Quan.
Baskı/Yayın Bilgisi: (2010)

Optimization of near-field scattering dielectric probe
Yazar:: Lim, Wei Wen
Baskı/Yayın Bilgisi: (2010)

Fringing effect on the dielectric constant measurement: experiment and simulation
Yazar:: Tan, Yi Ling.
Baskı/Yayın Bilgisi: (2011)

Novel high-k dielectrics for nanoelectronics
Yazar:: Chong, Vanessa Meng Meng
Baskı/Yayın Bilgisi: (2016)

Optical and dielectric properties of self-assembled germanium nanostructures and applications
Yazar:: Goh, Eunice Shing Mei.
Baskı/Yayın Bilgisi: (2012)

Synthesis and high frequency characterization of carbon nanotubes
Yazar:: Liu, Luming
Baskı/Yayın Bilgisi: (2013)

Time dependent dielectric breakdown in copper low-k interconnects : mechanisms and reliability models
Yazar:: Wong, Terence Kin Shun
Baskı/Yayın Bilgisi: (2013)

Double-gated CNTFETs with Al2O3/Si3N4 as gate dielectrics
Yazar:: Fan, Yu
Baskı/Yayın Bilgisi: (2009)

Characterization of GaN-based HEMT structures for high power applications
Yazar:: Pang, Shi Xiang.
Baskı/Yayın Bilgisi: (2013)

Study of leakage current of High-K dielectrics
Yazar:: Yan, Lina
Baskı/Yayın Bilgisi: (2009)

Development and characterization of GaN high electron mobility transistors for low noise applications
Yazar:: Liu, Zhihong
Baskı/Yayın Bilgisi: (2011)

Fabrication and characterization of microelectronic devices, circuits and systems (design of low-power high-performance comparators and SRAMs)
Yazar:: Yeo, Kiat Seng., ve diğerleri
Baskı/Yayın Bilgisi: (2008)

Characterization of nanostructured memory
Yazar:: Wong, Hian Choy.
Baskı/Yayın Bilgisi: (2010)

Optical characterization of metamaterials
Yazar:: Tan, Sin Nee
Baskı/Yayın Bilgisi: (2016)

Texture and stress study of barrier layers on various low-K materials in copper technology
Yazar:: Jia, Guojun
Baskı/Yayın Bilgisi: (2008)

Nanoscale characterization of metal/dielectric/semiconductor interfaces using ballistic electron emission microscopy
Yazar:: Qin, Hailang
Baskı/Yayın Bilgisi: (2012)

Characterization of hydrogenated amorphous silicon (a-Si:H) film stacks for deep submicron fuse link applications
Yazar:: Ang, Ting Cheong
Baskı/Yayın Bilgisi: (2008)

Thin film characterizations for resistive memory
Yazar:: Aw Yong, Boon Joon
Baskı/Yayın Bilgisi: (2013)

Fabrication and characterization of ISFET for PH measurements
Yazar:: Jiang, Chao
Baskı/Yayın Bilgisi: (2008)

Characterization of deep trench etch recipe
Yazar:: Tay, Chin Tiong.
Baskı/Yayın Bilgisi: (2008)

Fabrication and characterization of nano-scale metamaterials
Yazar:: Lin, Yue Hong.
Baskı/Yayın Bilgisi: (2010)

Fabrication and characterization of microelectronic circuits and systems
Yazar:: Shi, Xu, ve diğerleri
Baskı/Yayın Bilgisi: (2008)

Raman spectroscopy characterization of carbon thin films
Yazar:: Lim, Yaw Keong.
Baskı/Yayın Bilgisi: (2013)

Synthesis and characterization of graphene oxide and graphene nanosheet
Yazar:: He, Yuan Qi
Baskı/Yayın Bilgisi: (2010)